Specialty Gas
Specialty Gas
| Gas List | CAS No. |
| C4F6 | 685-63-2 |
| CH3F | 593-53-3 |
| CF3I | 2314-97-8 |
| C3F6 / PFC-1216 | 382-10-5 |
| C3H2F6 / HFC-236fa | 690-39-1 |
| C3H2F6 / HFC-236ea | 431-63-0 |
| C2H3F5 | 460-73-1 |
| C4H2F6 / HFO-1336mzz(E) | 66711-86-2 |
| C3H2F4 / HFO-1234ze(Z) | 29188-24-9 |
| COF2 / CF2O | 353-50-4 |
| CF4 | 75-73-0 |
| C4F7N | 42532-60-5 |